Flatness Measuring Machine

The DANTSIN-LAMTECH flatness measuring machine employs the grazing incidence light interference principle, specializing in rapid measurement and evaluation of flatness for high-precision machined surfaces. It is widely used in industries such as semiconductor manufacturing (wafers), LCD photomasks, glass, pump and valve sealing surfaces, as well as in optical engineering and laser engineering fields. 

Product Features:
◆ Non-contact flatness measurement  
◆ High-precision evaluation: <0.4 µm  
◆ Fast measurement speed: <3 seconds  
◆ Suitable for in-line workshop use and full inspection  
◆ Flatness assessment compliant with ISO/TS 12781-1 (FLTt)  
◆ 3D surface profile analysis software supporting CNC programming for batch measurements  
◆ Automatic surface recognition system, or manual selection of regions (circular, annular, rectangular areas) for evaluation  
◆ Large data acquisition capacity—capable of evaluating up to 300,000 points in a single scan  
◆ Rapid report generation and saving in .csv format, compatible with statistical analysis software such as Q-das  
◆ Widely used for polished, ground, or fine-ground precision surfaces, such as valve discs, sealing rings, etc.