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Flatness Measuring Machine

TOPOS 100 flatness measuring machine offers fast, non-contact flatness measurement for precision surfaces. Ideal for semiconductor, optics, and machining.
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Description

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Description

The TOPOS 100 Flatness Measuring Machine is designed for rapid, non-contact flatness measurement and evaluation of high-precision machined surfaces. Utilizing the principle of grazing incidence optical interferometry, it delivers reliable inspection without applying any load to the workpiece.

Features

  • Non-contact flatness measurement, ideal for precision and sensitive surfaces.
  • Fast measurement speed, suitable for on-line workshop use and full inspection processes.
  • Complies with ISO/TS 12781-1 (FLTt) flatness evaluation requirements.
  • Equipped with 3D surface profile analysis software for result visualization and further assessment.

Optional Configurations

  • Measurement solutions can be tailored based on workpiece dimensions, surface type, and inspection workflow.

Typical Applications

  • Semiconductor wafers, LCD photomasks, and precision glass.
  • Sealing surface inspection for pumps and valves.
  • Optical engineering, laser engineering, and high-precision machining.

Technical Specifications

Item Specification
Model TOPOS 100
Measurement Principle Grazing incidence optical interferometry
Measurement Method Non-contact flatness inspection
Evaluation Standard ISO/TS 12781-1 (FLTt)
Analysis Function 3D surface profile analysis software

What is Flatness Measuring Machine?

The TOPOS 100 flatness measuring machine from Hoyang Instrument Limited uses grazing-incidence light interference to rapidly measure and evaluate the flatness of high-precision machined surfaces. Its non-contact method ensures reliable inspection without loading the workpiece, making it suitable for sensitive precision surfaces. The system includes 3D surface-profile analysis software and complies with ISO/TS 12781-1 (FLTt) for flatness evaluation.

Applications

  • Semiconductor wafers and LCD photomasks
  • Precision glass components
  • Pump and valve sealing surfaces
  • Optical engineering and laser engineering components
  • High-precision machined parts requiring non-contact flatness inspection

FAQ

What measurement principle does the TOPOS 100 use?

It uses grazing-incidence light interference to measure flatness without contact.

Is the measurement method non-contact?

Yes, the non-contact method avoids loading the workpiece, making it ideal for sensitive surfaces.

What standards does the flatness evaluation comply with?

The flatness evaluation complies with ISO/TS 12781-1 (FLTt).

Can the TOPOS 100 be used for in-line inspection?

Yes, it is fast enough for in-line workshop use and full inspection.

What software features are included?

It includes 3D surface-profile analysis software for clear results and further evaluation.

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